Symposium Sessions

ES10.03.06 : Development of Ozone Gas Senors Based on Delafossite Thin Films

5:00 PM–7:00 PM Apr 23, 2019

PCC North, 300 Level, Exhibit Hall C-E

Joao Afonso1

1, Luxembourg Institute of Science and Technology, Belvaux, , Luxembourg

Ozone gas sensors development is a growing need in modern days, due to it’s increase use in several industry areas. A major problem is it’s production in office enviroment by lab equipments and laser printers. Ozone exposure can cause several long run cardiopulmunary problems. With this in mind there is the urge to develop efficient, cheap and office compatible sensors. Delafossite is an interesting p-type material that has shown it’s responsivity to ozone. With this in mind we will deeply explore delafossite properties and it’s responsivity to ozone as well as it’s integration into devices and understand the udnerlaying relation. Our delafossite films, are off-stoichiometry Cu0.66Cr1.33O2. These films have interesting electrical properties having proven conductivities up to 100 S/cm. Our films are deposited by Metal Organic Chemical Vapor Deposition (MOCVD) and undergo annealing steps in order to control its electrical properties. These films are compatible with large area deposition and so scalalable to industrial processes. We have been developing a state of the art etching process for delafossite with interesting results, leading into the patterning and the integration of the first devices, showing the responivitiy to ozone depending on the device geometry.