An electron microscope can be used to image materials of nanoscale dimensions allowing for examination of size and shape characteristics, and chemical composition. We use an FEI Apreo scanning electron microscope to image magnetic (using electromagnetic mode) and nonmagnetic nanostructures (using electrostatic mode) of various metals (Au and Ag) and metal alloys (Fe/Co, Fe/Au) using different sample preparation methods, and varying system parameters for optimal image quality and resolution. Samples are prepared with spin coating followed by plasma cleaning, with controlled plasma composition. System parameters of spot size and accelerating voltage for different built-in detectors (ETD, EBSD, in-column BSD detectors, and STEM) are studied. In addition parameters for EDX mapping will also be presented, especially for elemental analyis of alloys. Details of the imaging parameters and sample preparation for SEM imaging will be presented.
We acknowledge funding from NSF MRI 1626326.